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Stepper Motors for Vacuum Environment 10-7Torr at 125°C

Step Motors for Vacuum

Sizes NEMA 11, 17, 23

Step Motor Families: 211, 4118, 5718

Vacuum Ratings up to 10-7Torr na 125°C

The vacuum rated motor comes in several different sizes, depending on your applications torque and speed requirements.

Stepper Motors for Vacuum Environment - Design

Stepper Motors for Vacuum Environment - Production

A customized cleaning process combined with a vacuum bake-out is used to encourage outgassing of residual contaminants. Vacuum lubricated Bearings are rated from -80°C to 204°C which translates to a maximum motor external body temperature of 125°C. Prior to being shipped, all motors are wrapped in a clean room cloth and sealed air-tight. Special handling and care must be taken once package has been opened. This also passes Class 10 clean room requirements.

Depending on your chamber size and vacuum pump rate, these motors should be able to reach up to 10-7Torr at 125°C. Motors were tested in a chamber size of 1 Liter at a pressure rate of 1 mL/mm. Please contact an Applications Engineer to first select the best motor for the job.


Stepper Motor Bearings for Vacuum and High Temperature Environment

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Step Motors for vacuum

Stepper Motors for vacuum environement can be delivered in following sizes :

Step Motor for vacuum size NEMA11

Step Motor for vacuum size NEMA11
ModelTorqueCurrentFlangeLengthResist.Induct.InertiaWeightWiresDatasheet
-NmAmmmmOhmmHkg.cm^2kg--
211-13-01-VAC0.060.6728x28325.63.40.009150.108844Datasheet
211-13-02-VAC0.061.328x28321.71.10.009150.108844Datasheet
211-18-01-VAC0.10.6728x28457.14.80.012810.1405854Datasheet
211-18-02-VAC0.11.328x28451.30.80.012810.1405854Datasheet
211-20-01-VAC0.120.6728x2851.18.66.70.01830.199544Datasheet
211-20-02-VAC0.121.328x2851.11.91.70.01830.199544Datasheet

Step Motor for vacuum size NEMA17

Step Motor for vacuum size NEMA17
ModelTorqueCurrentFlangeLengthResist.Induct.InertiaWeightWiresDatasheet
-NmAmmmmOhmmHkg.cm^2kg--
4118S-02-VAC0.321.342x42342.83.60.032940.18144Datasheet
4118S-04S-VAC0.320.6742x42349.912.50.032940.18144Datasheet
4118S-04P-VAC0.321.3442x42342.53.10.032940.18144Datasheet
4118S-09-VAC0.320.942x42345.36.70.032940.18144Datasheet
4118M-01-VAC0.441.742x4240.11.530.051240.27214Datasheet
4118M-06S-VAC0.440.742x4240.110.821.80.051240.27214Datasheet
4118M-06P-VAC0.441.442x4240.12.75.50.051240.27214Datasheet
4118L-01-VAC0.59242x42481.42.70.067710.317454Datasheet
4118L-07S-VAC0.591.0542x42485.29.40.067710.317454Datasheet
4118L-07P-VAC0.592.142x42481.32.30.067710.317454Datasheet
4118C-01-VAC0.89242x4259.923.30.102480.408154Datasheet

Step Motor for vacuum size NEMA23

Step Motor for vacuum size NEMA23
ModelTorqueCurrentFlangeLengthResist.Induct.InertiaWeightWiresDatasheet
-NmAmmmmOhmmHkg.cm^2kg--
5718X-01S-VAC0.711.457x5744.22.85.60.12810.4761754Datasheet
5718X-01P-VAC0.712.857x5744.20.71.40.12810.4761754Datasheet
5718X-05S-VAC0.710.757x5744.21019.20.12810.4761754Datasheet
5718X-05P-VAC0.711.457x5744.22.54.80.12810.4761754Datasheet
5718X-15S-VAC0.712.157x5744.21.21.60.12810.4761754Datasheet
5718X-15P-VAC0.714.257x5744.20.30.40.12810.4761754Datasheet
5718M-02S-VAC1.222.157x5756.41.85.20.27450.680254Datasheet
5718M-02P-VAC1.224.257x5756.40.51.40.27450.680254Datasheet
5718M-04S-VAC1.220.757x5756.41442.30.27450.680254Datasheet
5718M-04P-VAC1.221.457x5756.43.510.60.27450.680254Datasheet
5718M-05S-VAC1.221.457x5756.43.6100.27450.680254Datasheet
5718M-05P-VAC1.222.857x5756.40.92.50.27450.680254Datasheet
5718L-01S-VAC2.081.457x5778.74.515.30.47580.99774Datasheet
5718L-01P-VAC2.082.857x5778.71.13.80.47580.99774Datasheet
5718L-03S-VAC2.082.157x5778.72.470.47580.99774Datasheet
5718L-03P-VAC2.084.257x5778.70.61.80.47580.99774Datasheet
5718L-04S-VAC2.083.2757x5778.715.20.47580.99774Datasheet
5718L-04P-VAC2.086.5457x5778.70.31.30.47580.99774Datasheet

Step Motors for Vacuum Environment - Solutions

Vacuum Stepper Motor NEMA23 - 10m Cables
Vacuum Stepper Motor NEMA11 with Brake

Ultra Vacuum Stepper Motor NEMA17

Low Vacuum 10^-5Pa
NEMA23 build-in Brake

Vacuum Rated Planetary Gearbox

NEMA23 Vacuum Rated Radiation and Resistant Stepper Motor

Radiation Resistant
AC Servomotor

High Temperature Vacuum
NEMA17 Stepper Motor

Vacuum Rated Resolver
for NEMA34 Stepper

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